Novel three-body nano-abrasive wear mechanism
نویسندگان
چکیده
Abstract Current three-body abrasive wear theories are based on a macroscale indentation process, and these claim that material cannot be achieved without damaging the hard mating surface. In this study, process of nano-abrasive system including single crystalline silicon substrate, an amorphous silica cluster, polyurethane pad, chemical mechanical polishing (CMP) is investigated via molecular dynamics simulations. The cluster slid in suspended state smooth regions underwent rolling impact asperity surface, realizing non-damaging monoatomic removal. This proves indentation-plowing not necessary when performing CMP Therefore, non-indentation rolling-sliding adhesion theory for between ultrasoft/hard surfaces proposed. only unifies current mainstream removal theories, but also clarifies damage can realized depth less than zero, thereby perfecting relationship surface damage. These results provide new understanding regarding microscopic mechanism as well research avenues at scale.
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ژورنال
عنوان ژورنال: Friction
سال: 2021
ISSN: ['2223-7690', '2223-7704']
DOI: https://doi.org/10.1007/s40544-020-0481-1